Auger electron spectroscopy (AES, Auger) is a high-energy electron beam excitation source of surface analysis techniques. AES analysis region of the excited atoms emit elements with characteristics of Auger electrons. AES electron beam to scan a large or small surface. It can also be directly focused on small surface topography (semiconductor industry often require this). Focused electron beam spot to 10nm in diameter or smaller surface topography makes AES into small elemental analysis very useful tool. In addition, it is possible to adjust the surface area of ??the electron beam so as to control the gate shield region size analysis. When used in conjunction with sputter ion source, when, AES qualified large and small area of ??depth profiles. When used in conjunction with a focused ion beam (FIB), which is useful for cross-sectional analysis of. Applications: surface defect analysis particle analysis depth profile analysis of small area of ??process control film component analysis AES advantages:????? Small area analysis (30 nm) good surface sensitivity good depth resolution??